JPH0242062U - - Google Patents
Info
- Publication number
- JPH0242062U JPH0242062U JP12048088U JP12048088U JPH0242062U JP H0242062 U JPH0242062 U JP H0242062U JP 12048088 U JP12048088 U JP 12048088U JP 12048088 U JP12048088 U JP 12048088U JP H0242062 U JPH0242062 U JP H0242062U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vapor deposition
- section
- shutter plate
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 2
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12048088U JPH0242062U (en]) | 1988-09-16 | 1988-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12048088U JPH0242062U (en]) | 1988-09-16 | 1988-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242062U true JPH0242062U (en]) | 1990-03-23 |
Family
ID=31366627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12048088U Pending JPH0242062U (en]) | 1988-09-16 | 1988-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242062U (en]) |
-
1988
- 1988-09-16 JP JP12048088U patent/JPH0242062U/ja active Pending